Improved thermal isolation of silicon suspended platforms for an all-silicon thermoelectric microgenerator based on large scale integration of Si nanowires as thermoelectric material

Fonseca L., Donmez I., Salleras M., Calaza C., Gadea G., Santos J.D., Morata A., Tarancon A. "Improved thermal isolation of silicon suspended platforms for an all-silicon thermoelectric microgenerator based on large scale integration of Si nanowires as thermoelectric material" Journal of Physics: Conference Series 660, 1, pp. - 2015 DOI: 10.1088/1742-6596/660/1/012113