Insight on the SU-8 resist as passivation layer for transparent Ga 2 O3 - In2 O3-ZnO thin-film transistors

Olziersky A., Barquinha P., Vil̀ A., Pereira L., Goņalves G., Fortunato E., Martins R., Morante J.R. "Insight on the SU-8 resist as passivation layer for transparent Ga 2 O3 – In2 O3-ZnO thin-film transistors" Journal of Applied Physics 108, 6, pp. - 2010 DOI: 10.1063/1.3477192