Soft chemistry routes to transparent metal oxide thin films. the case of sol-gel synthesis and structural characterization of Ta2O5 thin films from tantalum chloromethoxide

Epifani,M.; Zamani,R.; Arbiol, J.; Fabrega, C.; Andreu, T.; Pace,G.B.; Siciliano,P.; Morante, J.R. "Soft chemistry routes to transparent metal oxide thin films. the case of sol-gel synthesis and structural characterization of Ta2O5 thin films from tantalum chloromethoxide" Thin Solid Films 555, pp. 39 - 41. 2014 DOI: 10.1016/j.tsf.2013.05.139